Application of low temperature micro-solid nitrogen particles and its semiconductor wafer cleaning technology

introduction

In recent years, the high-functional high functionality of micrometer low-temperature solid particulates has been concerned in the field of ultra-high thermal flux cooling technology applied to high heat emission devices. In order to effectively utilize such low-temperature solid particles in advanced nanotechnology, our laboratory has developed a new physical semiconductor cleaning method, which uses a low temperature spray.

In the present method, in order to clarify the detailed mechanism of microscopic (SN2) particle behavior, a combined calculation of fluid kinetic analysis is carried out to clarify the micro-low temperature monolithic particulate heat transfer mechanism of the traditional measurement. For the expression of the control equation, the thermodynamic behavior of a single micro SN2 particle phase change is controlled by the Navier Stokes equation, the continuity equation, and the energy equation. The decisive feature of this phenomenon is to occur in strong evaporation (and later condensation) in the SN2 particles and the surrounding air phase interface. In addition to these thermodynamic analysis, the application of micro SN2 spray in semiconductor wafer cleaning technology was also studied. The SN2 particles impact silicon wafer heating machinery removal cleaning characteristics were clarified from the experimental and numerical values. Effects of ultra-high thermal flux cooling on removal properties of the heat shrink resist of organic materials were studied. In addition, the effect of ultrasonic atomizing micro-solid nitrogen on wafer ultra-clean performance.

experiment

For wafer samples used in the process, the peeling properties of the polysilicon / gate silicon oxide / silicon substrate coated with the positive KrF photoresist were examined. These wafers are manufactured as follows. First, a hot oxidation of 8 inch P-type silicon substrates and a 6-nanometer thick gate oxide layer is deposited on the substrate. A 150 nm thick polysilicon layer was deposited on the gate oxide using LPCVD (low pressure chemical vapor deposition). The HMDS (hexamethylene silicon) layer is applied to the surface of the polysilicon to help the photoresist adhere to the polysilicon, and then the rotary coater is used to form 500 nm thick photoresist layers on the HMDS layer. . Photoresist is patterned using 193 nm KrF excitation light. The door length is 0.34m, and the door width is 10m. Polysilicon is electrocardiated by an inductive coupled plasma etch system (silicon etch system, application material company) to form bromide / oxygen chemical etching into a pattern. These wafers are cut into a rectangular sheet of approximately 5 mm × 5 mm.

Results and discussion

Figure 7 shows the calculation results of the non-organized internal stress distribution of the SN2 particles and the deformed resist. It can be seen that the interaction between the SN2 particles and the resist is reasonably simulated. The size of the stress in the wafer resist increases as the plastic deformation increases. The pressure between the SN2 particles and the pressure of the wafer resist increases with the impact of the SN2 particles. It may be possible to predict the collision of SN2 particles and plastic deformation, and the collision causes the shear deformation of the resist – polysilicon interface. As a result, the resist removal performance is improved by the scratching effect of the micro-recess in the narrow recess between the wiring pattern.

Figure 7 Replace the calculation of the stress distribution of the reaction particles and deformation resists

Figure 8 shows an experimental result (scanning electron microscopy) using micro SN2 spray produced by the Lavar nozzle method (scanning electron microscopy). The resist can be effectively removed, and the main contaminants on the surface of the wafer are also successfully removed. This improved resist removal cleaning performance is a result of the removal of the motion resist removal of the very fine (nanoscale diameter dimension) SN2 particles. At the current stage of technological development, a given Sn2 particle digital density condition is a small amount of residual resist in the concave portion of the wiring pattern. However, we have successfully developed a single component of a single component that does not use gaseous helium.

Figure 8 Remove the experimental result of the photoresist with a micro SN2 spray (scanning electron microscope image)

Values ??and experiments have found that due to the ultra-high heat transfer characteristics, the mixed interaction of the fluid mechanical force and the thermal mechanical force contributes to the resist removal – the cleaning process. In particular, the effect of ultra-high thermal flux cooling on the resistance properties of thermal shrinkage removing resistance of the resist material was found, and the effect of ultrasonic atomized micro Sn2 particles on the ultra-clean performance of the semiconductor wafer was newly discovered.

Summarize

When the micro-solid nitrogen particles are used in the heated substrate together with the refrigerant, the ultra-high cooling heat flux level is achieved during operation, and therefore, the cooling performance is better than conventional liquid spray cooling. Since the micro SN2 cooling has the advantage of avoiding direct contact and latent heat transfer of the membrane boiling state, the ultra-short time scale heat transfer in the thin boundary layer is more likely to be in the liquid spray.

Numerical and experiments have found that the impact and ultra-high heat transfer characteristics of the micro-solid particles contribute to the resist removal – the cleaning process. An important discovery is that the impact of ultra-high thermal flux cooling plays an important role in removal properties related to thermal contraction of resistant materials.

The results obtained are of great significance in the field of low temperature cooling technology of advanced high heat emission devices, but will also help nano-devices engineering, which is closely related to semiconductor wafer cleaning technology.

Tea packaging design company analysis to replace the advantages and disadvantages of packaging color?

That color makes your product in the mall. After the goods arrive, the buyer will tear open the transport envelope or cardboard box, and they will first see the inside of the goods. Color is part of the brand, which tells what you are suitable for your product, and what buyers can get from it.

When you consider changing the color on the package, you need to consider a lot of things. Changing the color scheme may be your product needs to attract new or more users. It is also possible to destroy everything you have established so far. Even a tiny color change will greatly change the public to your brand.

Now we have to make it simple. Based on the following guidelines, a list of advantages and disadvantages is established to see if you change the packaging color in the future. Think about how long your brand, it is now like, the photo of the photo, competitors’ packaging color, and the reasons behind the change. These two factors will determine if you should take action.

Packaging design can contact @ 元化 design, free design recommendations and various industrial packaging design references.

When can you change the packaging color?

No matter how you choose the original color of the packaging, you need a lot to consider.

Perhaps you have designed a perfect super-target audience packaging with color psychology. Or you ask your friends how they look. Perhaps you have chosen a color scheme that is very important to you. Maybe you just have to choose a color at all.

But since you are considering changing your packaging, please remember that you are not creating new things. You are tampering with something.

First ask why you should consider changing.

Will you launch a new product? Or will you separate a product and other products you sell? Perhaps this product should be able to attract users different from you already established.

Do you want to delete some content? Changes in your industry or arguments related to your brand may prompt you to redesign the way you have a product.

Is your company merged with another company? You need a way to integrate these two brands, and you will not lose your identity.

Does your brand present your initiality? That’s it. Smart entrepreneurs will choose their own products according to their own market.

Are you ready to update? If you have already existed for a long time, your packaging may belong to another era. Sometimes, color and patterns will appear at a certain point in time. Imagine the iconic design of the 90s paper cup. For a certain day, now popular things will be eliminated like Solo Jazz Cup.

Your most important job is to ensure that changes are not random. You are changing the consumer view of your brand, so if you want to turn your packaging into blue, you need to have a better reason to "because I like blue".

Replace the benefits of packaging colors

Can attract new audience.

The color you choose will affect the feelings and ideas of the audience to your product. Watch them as target objects and why they have to do this.

Your product and its pure white packaging, attract consumers in a simple, clean beauty. You want to emphasize your company’s commitment to sustainable development, consider adding green elements in your packaging. This will attract young, pay attention to environmentally friendly consumers, they will pay attention to the ingredients of the products they purchased.

Please explain that you want to attract who join your brand and as accurate as possible. You are young, paying attention to environmentally friendly consumers may also have political progress and like to go outdoors. When you create a new palette of the package, you need to consider some factors now.

You can go to the old meaning.

Color has a high-end product that connotes customers want black packaging. As we said, green is representative, "Hey, we are environmentally friendly! Both people’s things usually use cold tones, while girls’ things are usually packaged with warm colors.

Perhaps at the beginning of your company, you are specializing in women’s products, but now you have products that are suitable for different genders. Your original pink packaging is no longer suitable for your company, so you need to use a more neutral color.

Consider the color change you want to display in the new package. Orange color and other bright colors show an exciting, interesting new role. Add black or purple to the packaging palette, indicating that you have become high-end products.

You will adapt to the current trend.

The color scheme will not exist forever. If you don’t have a very simple palette, it seems that something looks good 10 years ago. Sometimes, this situation will even occur in monochrome design. Imagine mud, avocado 70s, or neon lights in the 1980s, in a specific era, use it to match the color. Think about how to be defined in the 1990s, neutral, blue tones and minimalist designs.

Changing the packaging color is to adapt to the changes in the times and tastes, reshape part of the brand. And don’t use the fashion trend to reuse the package without updating the package. They can, but you don’t know which trend will return, when to return, and how to return. You can’t make your brand becomes dull during this time.

So I want to combine your brand goals and today’s palette. PANTONE annual color is a good start. From a short term, a wide popular color may work, although it will return you to the original position later. If you want to change the color of the packaging to update the brand, then you will go out.

Change the packaging color is unfavorable.

Your product has not been recognized.

If your product is known for its brown box, don’t turn over a blue box overnight.

For consumers, it seems that the change will make people confused, and it will impair your image. Even if your trademark will still appear on the package after you change the packaging, your unique color design can also tell your product existence. You need to do this when your product is close to the competitorship product.

Minimalistic packaging design retains similar colors, but they have lost opportunities for them to stand out in the store.

Your color is too similar to other companies’ colors.

There are too many colors there. Different combinations of nature, color and color, make it easier for you to find your own unique, but create a color palette that is suitable for your brand is too similar to other companies.

After determining the new color, ask yourself two questions:

How do your competitors pack their products?

Is the combination you consider by other companies?

This is not a problem, if another company using the palette is small, in a completely different industry. But if you want a national brand’s iconic color, then choose a different palette so you will not look like imitating them or wants to be this brand. For example, select pink, orange and white palette will make your package

Regeneration brand is very expensive.

Designers spend money research is spending money. The brand is not cheap.

That doesn’t mean that you should not change the color of the package, but you have to consider changes in investment conditions. If your research finds that the color does not affect your profit, don’t change the packaging color during this time. If a large-scale redesign is too high, it is not possible to bring a valuable return, then find a smaller and cheap update method.

Changing the packaging color is always risky, but it should be able to be calculated. Spotify has considered more than 5,000 greens before choosing a perfect hue for its new logo.

As long as the color is changed, it is easy.

Change the package after the merger, which may be the most effective way to keep your identity and integrate it with other identity. When Google acquired Motorola, Motorola changed its own logo to Google’s new positioning.

If you want to maintain a specific market, you want to make your packaging more new, you can consider keeping your color scheme, but only keeps brightness and color. Even a small change can make your picture more bold, soft, or more modern, and will not deviate from the style you have established. Try to use the dark color you have used to see what is different after your packaging appearance is different.

Apple HomePod, is it very much?

Someone asked, if there is no iPhone, only iPad, can you use HomePod.Seeing this problem, the first reaction is not to use, but should carefully consider whether it is worth homepod.

One reason is that HomePod is very limited.Inscoup, SIRI is limited. Specifically, SIRI is too small. Especially compared with numerous domestic smart speakers, HomePod is very obvious.

Therefore, some people say HOMEPOD, in addition to listening to Apple’s own Apple Music, other experiences are matched. I am quite agree with this evaluation.

That is, if you are not the faithful user of Apple Music, it is basically not recommended to use HomePod. Of course, if you like to use Siri, homepod is also good. Use Siri with homepod, for example, consult the weather to Siri, ask the encyclopedia knowledge, and so on, this experience is still very good. I often use this. However, users who like to use Siri everyday seems not much.

There is also an important reason for not recommending Homepod, that is, electronic devices cannot connect homepod through Bluetooth, which means that in addition to Apple’s hardware devices, other brands of equipment cannot connect to HomePod. Users in the problem are not using the iPhone, and when other brands can not connect to HomePod through Bluetooth, they may swear.

However, Apple has been working hard to improve the practicality of the HomePod system. In fact, the HOMEPOD system has been improved. For example, a shortcut instruction can be performed recently.

However, if SIRI does not join more practical content, it is hard to make more users satisfaction. For example, an important content is news. However, from the perspective of national conditions, the content of news information is difficult to join Apple.

Since Apple launches more affordable HomePod mini, users who use the HomePod series products have increased a lot. More and more people have experienced the features of HomePod.

From the feedback from the user, HOMEPOD is very likely to be very high. Because HomePod can’t play the podcast, I was allowed to be discarded. However, after the recent HOMEPOD system upgrade, re-play the podcast, I started to increase the number of times.

Therefore, it is certainly prudential consideration before starting homepod, considering whether you use HomePod scenes.

Jaspal Rana to travel as national coach for junior Worlds despite unresolved issues

Shooting coach Jaspal Rana, who was labelled as a ‘negative influence’ on the Indian team in the lead-up to the Tokyo Olympics by the National Rifle Association of India (NRAI) president Raninder Singh, will be accompanying the junior national pistol team as the chief coach during the Junior World Championship later this month.

Headlined by Olympian Manu Bhaker, a team of 36 pistol shooters – 18 boys and 18 girls – will compete in eight events at the junior worlds that will be held in Lima, Peru, starting September 27. Raninder had also mentioned a rift between Bhaker and Rana, which he said could have impacted the teenage shooter’s performance in her maiden Olympics.

Ronak Pandit and Samresh Jung had travelled as pistol coaches to Tokyo after a string of events had increased the rancour and broken down communication between Bhaker and Rana. While announcing the team on August 27, the NRAI did not release the names of coaches who would travel with the team. On Monday, the NRAI told The Indian Express that Rana will continue in his role as the junior pistol team’s chief coach despite the allegations made against him until the review of the Tokyo Games performance is complete. The preparatory camp for the championship will begin in New Delhi on Wednesday.